Author:
Smirnova T. P.,Yakovkina L. V.,Borisov V. O.,Lebedev M. S.
Subject
Materials Chemistry,Inorganic Chemistry,Physical and Theoretical Chemistry
Reference15 articles.
1. M. Baklanov, M. Green, and K. Maex, Dielectric Films for Advanced Microelectronics: Series for Electronic and Optoelectronic Applications, Wiley (2007).
2. P. King, Sedghi Naser, S. Hall, I. Z. Mitrovic, P. R. Chalker, M. Werner, and S. Hindley, J. Vac. Sci. Technol., B32, 031031 (2014).
3. T. P. Smirnova, L. V. Yakovkina, V. N. Kitchai, V. V. Kaichev, Yu. V. Shubin, N. B. Morozova, and K. V. Zherikova, J. Phys. Chem. Sol., 69, 685 (2008).
4. T. P. Smirnova, F. A. Kuznetsov, L. V. Yakovkina, V. V. Kaichev, V. I. Kosyakov, M. S. Lebedev, and V. N. Kichai, ECS Transactions, 25, 875 (2009).
5. T. P. Smirnova, S. A. Beloshapkin, V. V. Kaichev, N. I. Alferova, and Song Jeong-Hwan, J. Phys. Chem. Sol., 71, 836 (2010).
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