DIELECTRIC LAYERS BCxNy: SYNTHESIS BY THE DECOMPOSITION OF VAPORS OF ORGANOBORON COMPOUNDS, COMPOSITION AND CHEMICAL STRUCTURE
Author:
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://link.springer.com/content/pdf/10.1134/S0022476621100188.pdf
Reference57 articles.
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4. .1016/j.carbon.2017.06.024
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2. Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films;Russian Journal of Inorganic Chemistry;2023-02
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