Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films
Author:
Publisher
Pleiades Publishing Ltd
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry,Materials Science (miscellaneous)
Link
https://link.springer.com/content/pdf/10.1134/S0036023622602173.pdf
Reference29 articles.
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