Abstract
Abstract
In Atomic Force Microscopy (AFM) high-performance and high-precision control of the AFM scanner and of the imaging forces is crucial. Particularly at high imaging speeds the dynamic behaviour of the scanner may cause imaging artifacts and limit the maximum imaging rate. This contribution discusses and presents recent improvements in AFM instrumentation for faster imaging by means of mechatronic design and utilizing modern control engineering methods. Combining these improvements enables AFM imaging at more than two orders of magnitudes faster than conventional AFMs.
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
18 articles.
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