Funder
Directorate for Engineering
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference62 articles.
1. Abramovitch DY, Andersson SB, Pao LY, Schitter G (2007) A tutorial on the mechanisms, dynamics, and control of atomic force microscopes. Proc. American Control Conference, New York City NY, New York City, NY, pp 3488–3502
2. Salapaka SM, Salapaka MV (2008) Scanning probe microscopy. IEEE Control Syst 28(2):65–83
3. Felming AJ (2013) A review of nanometer resolution position sensors: operation and performance. Sensors Actuators A 190:106–126
4. Devasia S, Eleftheriou E, Moheimani SOR (2007) A survey of control issues in nanopositioning. IEEE Trans Control Syst Technol 15(5):802–823
5. Leang KK, Zou Q, Devasia S (2009) Feedforward control of piezoactuators in atomic force microscope systems. IEEE Control Syst 29(1):70–82
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献