Abstract
<p>High sensitivity MEMS pressure sensor chip for
different ranges (1 to 60 kPa) utilizing the novel electrical circuit of
piezosensitive differential amplifier with negative feedback loop (PDA-NFL) is
developed. Pressure sensor chip PDA-NFL utilizes two bipolar-junction
transistors (BJT) with vertical n-p-n type structure (V-NPN) and eight
piezoresistors (p-type). Both theoretical model of sensor response to pressure
and temperature and experimental data are presented. Data confirms the
applicability of theoretical model. Introduction of the amplifier allows for
decreasing chip size while keeping the same sensitivity as a chip with classic
Wheatstone bridge circuit.</p>
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Cited by
4 articles.
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