Development of a Novel Silicon Membrane MEMS Capacitive Pressure Sensor for Biological Applications
Author:
Affiliation:
1. Nanotechnology Research, and Application Center Istanbul Turkey, Sabanci University, Tuzla 34956, Türkiye
Publisher
MDPI
Link
https://www.mdpi.com/2673-4591/48/1/54/pdf
Reference11 articles.
1. Design, Fabrication and Characterization of Piezoelectric Cantilever MEMS for Underwater Application;Abdul;Micro Nano Eng.,2020
2. Abdul, B., Mastronardi, V.M., Qualtieri, A., Algieri, L., Guido, F., Rizzi, F., and De Vittorio, M. (2020). Sensitivity and Directivity Analysis of Piezoelectric Ultrasonic Cantilever-Based Mems Hydrophone for Underwater Applications. J. Mar. Sci. Eng., 8.
3. (2023, May 08). Available online: http://www.vti.se/.
4. (2023, May 08). Available online: https://www.fujielectric.com/.
5. Basov, M. (November, January 31). Pressure Sensor with Novel Electrical Circuit Utilizing Bipolar Junction Transistor. Proceedings of the 2021 IEEE Sensors, Sydney, Australia.
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