Surface and interface structures of epitaxial silicon nitride on Si(111)
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.67.035304/fulltext
Reference39 articles.
1. CrystallineSi3N4thin films on Si(111) and the4×4reconstruction onSi3N4(0001)
2. Nitridation of Si()
3. Atomic transport during growth of ultrathin dielectrics on silicon
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