Author:
Wang X.-S.,Zhai G.,Yang J.,Wang L.,Hu Y.,Li Z.,Tang J.C.,Wang X.,Fung K.K.,Cue N.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference46 articles.
1. D.R. Messier, W.J. Croft, in: E.R. Wilcox (Ed.), Growth Mechanisms and Silicon Nitirde, Marcel Dekker, New York, 1982, p. 131
2. Silicon Nitride,1990
3. M. Arienzo, W.A. Orr-Arienzo, in: D.A. Bonnell, T.Y. Tien (Eds.), Preparation and Properties of Silicon Nitride Based Materials, Materials Science Forum 47, Trans Tech Publications, Zürich, 1989, p. 228
4. Making silicon nitride film a viable gate dielectric
5. Ultrathin oxide-nitride gate dielectric MOSFET's
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