Substrate temperature dependence of the initial growth mode ofSiO2on Si(100)-(2×1) exposed toO2: A photoemission study
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.40.10356/fulltext
Reference14 articles.
1. Insitumeasurements of SiO(g) production during dry oxidation of crystalline silicon
2. Kinetics of high‐temperature thermal decomposition of SiO2 on Si(100)
3. Limitations in low‐temperature silicon epitaxy due to water vapor and oxygen in the growth ambient
4. Effect of heat treatment on chemical and electronic structure of solid SiO : An electron spectroscopy study
5. Initial stage of thermal oxidation of the Si(111)-(7×7) surface
Cited by 34 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Silicon thermal oxidation and its thermal desorption investigated by Si 2p core-level photoemission;Journal of Physics: Conference Series;2010-06-01
2. Etching-enhanced surface stress relaxation during initial ozone oxidation;Surface Science;2007-03
3. In situ photoemission study on initial growth of HfO2 films on Si(100);Surface Science;2005-05
4. Observation of a precursor in the adsorption of molecular oxygen onSi(100)2×1;Physical Review B;2004-04-16
5. Thermal decomposition pathway of Ge and Si oxides: observation of a distinct difference;Thin Solid Films;2000-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3