Multiscale modeling of oxygen diffusion through the oxide during silicon oxidation
Author:
Publisher
American Physical Society (APS)
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.70.195312/fulltext
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1. The electronic structure at the atomic scale of ultrathin gate oxides
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