Model for amorphization processes in ion-implanted Si
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.49.16367/fulltext
Reference26 articles.
1. Proportionality between ion-beam-induced epitaxial regrowth in silicon and nuclear energy deposition
2. A defect model for ion-induced crystallization and amorphization
3. Divacancy control of the balance between ion-beam-induced epitaxial cyrstallization and amorphization in silicon
4. Amorphization processes in ion implanted Si: Ion species effects
5. Mechanisms of amorphization in ion implanted crystalline silicon
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Recent progress in large-scale electronic state calculations and data-driven sciences;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Atomistic modeling of the Ge composition dependence of solid phase epitaxial regrowth in SiGe alloys;Journal of Applied Physics;2017-09-14
3. Damage Formation, Amorphization and Crystallization in Semiconductors at Elevated Temperatures;Ion Beam Modification of Solids;2016
4. Controllable fabrication of amorphous Si layer by energetic cluster ion bombardment;Vacuum;2013-12
5. Elastic and vibrational properties of group IV semiconductors in empirical potential modelling;Journal of Physics: Condensed Matter;2013-09-24
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3