Experimental study of diffusive cooling of electrons in a pulsed inductively coupled plasma
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.65.056405/fulltext
Reference29 articles.
1. Time‐modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species
2. Pulse-time modulated plasma discharge for highly selective, highly anisotropic and charge-free etching
3. Modulated discharges: Effect on plasma parameters and deposition
4. Time‐resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments
5. Measurements of pulsed‐power modulated argon plasmas in an inductively coupled plasma source
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