Surface roughness of sputteredZrO2films studied by atomic force microscopy and spectroscopic light scattering
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.54.4021/fulltext
Reference24 articles.
1. Kinetics of Surface Growth: Phenomenology, Scaling, and Mechanisms of Smoothening and Roughening
2. EXPERIMENTAL OBSERVATIONS OF SELF-AFFINE SCALING AND KINETIC ROUGHENING AT SUB-MICRON LENGTHSCALES
3. Surface smoothing and roughening by dielectric thin film deposition
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