Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz
Author:
Publisher
American Physical Society (APS)
Subject
Atomic and Molecular Physics, and Optics
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.45.2520/fulltext
Reference97 articles.
1. Critical issues in plasma-assisted vapor deposition processes
2. The time behaviour of electron transport in RF fields in gases
3. The Momentum Transfer Cross Section for Electrons in Argon in the Energy Range 0 - 4 eV
4. The elastic scattering of electrons from inert gases. III. Argon
Cited by 131 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Comparison of distributions of etching rate and calculated plasma parameters in dual-frequency capacitively coupled plasma;Japanese Journal of Applied Physics;2023-08-23
2. An improved calculation scheme of electron flow in a propagator method for solving the Boltzmann equation;Japanese Journal of Applied Physics;2023-06-29
3. Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode;Journal of Physics D: Applied Physics;2022-12-22
4. Estimations of secondary electron emission coefficients of Si, SiO2, and polyimide electrodes in dual-frequency capacitively coupled discharge;Japanese Journal of Applied Physics;2022-11-11
5. Study on surface discharge of polyimide at high frequency;2021 IEEE Sustainable Power and Energy Conference (iSPEC);2021-12-23
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3