The time behaviour of electron transport in RF fields in gases
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/21/i=6/a=005/pdf
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1. Total and partial electron collisional ionization cross sections for CH4, C2H6, SiH4, and Si2H6
2. Evidence for a time dependent excitation process in silane radio frequency glow discharges
3. Electron energy distributions and excitation rates in high-frequency argon discharges
4. Time‐dependent excitation in high‐ and low‐frequency chlorine plasmas
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