Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

Abstract

Abstract In a high-frequency capacitively coupled plasma (HF-CCP), few studies have been carried out for the transport of charged particles in the active bulk plasma with high electronegativity. The electric field E(t), specifically, time-varying reduced field E(t)/N g provides key knowledge about the characteristics of collisional bulk plasma. Numerical modeling is the only method for estimating E(t)/N g , while a limited number of collision cross sections and related transport parameters are available. Under these circumstances, we discuss how to estimate the reduced field E(t)/N g , i.e. E(t) in active bulk plasma with high electronegativity in HF-CCP through investigation of the correlation between the DC-critical reduced field E / N g Crit . and the HF-effective reduced field E ( t ) / N g eff . Our previous discussion on the correlation is validated by increasing the number of results of E ( t ) / N g eff . The relation between the electronegativity and the ionization degree is derived from the sustainable condition in the bulk plasma.