Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields
Author:
Funder
Indian National Science Academy
U.S. Department of Energy
Publisher
American Physical Society (APS)
Subject
General Engineering
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevResearch.4.013059/fulltext
Reference75 articles.
1. Revisiting the anomalous RF field penetration into a warm plasma
2. Stochastic heating in single and dual frequency capacitive discharges
3. Analytical solution for capacitive RF sheath
4. Power dissipated in low‐pressure radio‐frequency discharge plasmas
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