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Kinetics of Initial Layer-by-Layer Oxidation of Si(001) Surfaces

  • Published:1998-01-12 Issue:2 Volume:80 Page:345-348
  • ISSN:0031-9007
  • Container-title:Physical Review Letters
  • language:en
  • Short-container-title:Phys. Rev. Lett.

Author:

Watanabe Heiji,Kato Koichi,Uda Tsuyoshi,Fujita Ken,Ichikawa Masakazu,Kawamura Takaaki,Terakura Kiyoyuki

Publisher

American Physical Society (APS)

Subject

General Physics and Astronomy

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