Oxidation of Silicon Nanopillars
Author:
Affiliation:
1. Center for Innovative Integrated Electronic Systems, Tohoku University, Sendai 980-0845, Japan
2. Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan.
Funder
Japan Society for the Promotion of Science
Cabinet Office, Government of Japan
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.1c01514
Reference62 articles.
1. Realization of a Silicon Nanowire Vertical Surround-Gate Field-Effect Transistor
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3. Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET
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