Role of Activated Chemisorption in Gas-Mediated Electron Beam Induced Deposition
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.109.146103/fulltext
Reference29 articles.
1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
2. A critical literature review of focused electron beam induced deposition
3. Gas-assisted focused electron beam and ion beam processing and fabrication
4. Kinetics of gas mediated electron beam induced etching
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