Kinetics of gas mediated electron beam induced etching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3662928
Reference31 articles.
1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
2. Gas-assisted focused electron beam and ion beam processing and fabrication
3. Effects of electrons on the shape of nanopores prepared by focused electron beam induced etching
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5. XeF2gas-assisted focused-electron-beam-induced etching of GaAs with 30 nm resolution
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