Author:
Azevedo G. de M.,Behar M.,Grande P. L.,Borges I.
Publisher
American Physical Society (APS)
Cited by
3 articles.
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1. Investigation of deep implanted carbon and oxygen channeling profiles in [110] silicon, using d-NRA and SEM;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-02
2. Depth profiling of high energy nitrogen ions implanted in the 〈100〉, 〈110〉 and randomly oriented silicon crystals;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-03
3. Atomic Collisions in Matter;Electrostatic Accelerators