A vertical lamellae arrangement of sub-16 nm pitch (domain spacing) in a microphase separated PS-b-PEO thin film by salt addition-Reference-Cited by-同舟云学术

A vertical lamellae arrangement of sub-16 nm pitch (domain spacing) in a microphase separated PS-b-PEO thin film by salt addition

Published:2015 Issue:27 Volume:3 Page:7216-7227
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Ghoshal Tandra¹²³⁴⁵,Ntaras Christos⁶⁷⁸⁹,Shaw Matthew T.¹⁰¹¹¹²⁵,Holmes Justin D.¹²³⁴⁵,Avgeropoulos Apostolos⁶⁷⁸⁹,Morris Michael A.¹²³⁴⁵

Affiliation:

1. Materials research group

2. Department of Chemistry and Tyndall National Institute

3. University College Cork

4. Cork

5. Ireland

6. Department of Materials Science Engineering

7. University of Ioannina

8. Ioannina

9. Greece

10. Intel Ireland Ltd.

11. Collinstown Industrial Estate

12. Co. Kildare

Abstract

8 nm feature size nanopatterns have been fabricated from a symmetric polystyrene-b-polyethylene oxide BCP of low molecular weight using lithium ion addition.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/TC/C5TC00485C

Reference62 articles.

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2. Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

3. Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

4. Molecularly Functionalized Silicon Substrates for Orientation Control of the Microphase Separation of PS-b-PMMA and PS-b-PDMS Block Copolymer Systems

5. Monte Carlo Simulations of Asymmetric Diblock Copolymer Thin Films Confined between Two Homogeneous Surfaces

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