Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et3Si)3As through the GaAs process
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry
2. Department of Chemistry
3. University of Helsinki
4. Finland
5. Department of Physics
6. University of Jyväskylä
7. Division of Material Physics
Abstract
A new chemistry has been developed to deposit GaAs, the quintessential compound semiconductor.
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/TC/C5TC03079J
Reference39 articles.
1. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
2. Industrial Applications of Atomic Layer Deposition
3. Atomic layer deposition of nanostructured materials, ed. N. Pinna and M. Knez, Wiley VCH, Weinheim, Germany, 2012
4. Atomic Layer Deposition for Semiconductors, ed. C. S. Hwang, Springer Science + Business Media, New York, 2014
5. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Atomic layer deposition of PbCl2, PbBr2 and mixed lead halide (Cl, Br, I) PbXnY2−n thin films;Dalton Transactions;2022
2. Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors;Semiconductor Science and Technology;2017-08-14
3. Secondary Electron Emission Materials for Transmission Dynodes in Novel Photomultipliers: A Review;Materials;2016-12-16
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3