Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors
Author:
Funder
TUBITAK
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6641/aa7ade/pdf
Reference455 articles.
1. Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
2. A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
3. A brief review of atomic layer deposition: from fundamentals to applications
4. Atomic layer epitaxy - a valuable tool for nanotechnology?
5. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
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