Atomic layer deposition of PbCl2, PbBr2 and mixed lead halide (Cl, Br, I) PbXnY2−n thin films-Reference-Cited by-同舟云学术

Atomic layer deposition of PbCl₂, PbBr₂ and mixed lead halide (Cl, Br, I) PbX_nY_2−n thin films

Published:2022 Issue:39 Volume:51 Page:15142-15157
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Popov Georgi¹^ORCID,Bačić Goran²^ORCID,Van Dijck Charlotte¹,Junkers Laura S.¹^ORCID,Weiß Alexander¹^ORCID,Mattinen Miika¹^ORCID,Vihervaara Anton¹^ORCID,Chundak Mykhailo¹^ORCID,Jalkanen Pasi³^ORCID,Mizohata Kenichiro³^ORCID,Leskelä Markku¹^ORCID,Masuda Jason D.⁴^ORCID,Barry Seán T.²^ORCID,Ritala Mikko¹^ORCID,Kemell Marianna¹^ORCID

Affiliation:

1. Department of Chemistry, University of Helsinki, P. O. Box 55, FI-00014 Helsinki, Finland

2. Department of Chemistry, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada

3. Department of Physics, University of Helsinki, P. O. Box 43, FI-00014 Helsinki, Finland

4. Department of Chemistry, Saint Mary's University, 923 Robie Street, Halifax, Nova Scotia B3H 3C3, Canada

Abstract

We describe six new atomic layer deposition processes for PbCl2 and PbBr2. Two processes deliver high quality uniform and conformal PbCl2 and PbBr2 thin films fit for semiconductor devices.

Funder

Helsingin Yliopisto

Emil Aaltosen Säätiö

Walter Ahlströmin Säätiö

Academy of Finland

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2022/DT/D2DT02216H

Reference78 articles.

1. Synthetic Approaches for Halide Perovskite Thin Films

2. Halide Perovskite Photovoltaics: Background, Status, and Future Prospects

3. Synthesis, optoelectronic properties and applications of halide perovskites

4. Halide Perovskites for Applications beyond Photovoltaics

5. Micro‐ and Nanopatterning of Halide Perovskites Where Crystal Engineering for Emerging Photoelectronics Meets Integrated Device Array Technology