Electron nanoprobe induced oxidation: a simulation of direct-write purification-Reference-Cited by-同舟云学术

Electron nanoprobe induced oxidation: a simulation of direct-write purification

Author:

Fowlkes J. D.¹²³⁴⁵,Geier B.⁶⁷⁸,Lewis B. B.⁹¹⁰¹¹⁵,Rack P. D.¹²³⁴⁵,Stanford M. G.⁹¹⁰¹¹⁵,Winkler R.⁶⁷⁸,Plank H.⁶⁷⁸¹²¹³

Affiliation:

1. Nanofabrication Research Laboratory

2. Center for Nanophase Materials Sciences

3. Oak Ridge National Laboratory

4. Oak Ridge

5. USA

6. Graz Centre for Electron Microscopy

7. 8010 Graz

8. Austria

9. Materials Science and Engineering Department

10. The University of Tennessee

11. Knoxville

12. Institute for Electron Microscopy and Nanoanalysis

13. Graz University of Technology

Abstract

A simulation provides insight into the electron beam driven purification of carbon contaminated nanoscale deposits using O₂ and H₂O gas.

Funder

European Cooperation in Science and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

Reference42 articles.

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