Low-temperature ALD/MLD growth of alucone and zincone thin films from non-pyrophoric precursors
Author:
Affiliation:
1. Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland
2. Inorganic Materials Chemistry, Ruhr University Bochum, 44801 Bochum, Germany
Abstract
Funder
Deutscher Akademischer Austauschdienst
Suomen Akatemia
Deutsche Forschungsgemeinschaft
Publisher
Royal Society of Chemistry (RSC)
Subject
Inorganic Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2022/DT/D2DT02279F
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