Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability-Reference-Cited by-同舟云学术

Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

Published:2017 Issue:11 Volume:7 Page:6548-6558
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Chen Yang¹²³⁴^ORCID,Chen Ailian⁵²³⁴,Qin Jiawei¹²³⁴

Affiliation:

1. School of Materials Science and Engineering

2. Changzhou University

3. Changzhou

4. China

5. School of Mechanical Engineering

Abstract

Organic/inorganic composite particles with a core–shell structure exhibit potential applications in chemical mechanical polishing/planarization (CMP) for mechanically challenging materials (copper and low-k dielectrics etc.).

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/RA/C6RA26437A

Reference39 articles.

1. Ultra-smooth BaTiO3 surface morphology using chemical mechanical polishing technique for high-k metal-insulator-metal capacitors

2. Polishing mechanism and surface damage analysis of type IIa single crystal diamond processed by mechanical and chemical polishing methods

3. A material removal model for silicon oxide layers in chemical mechanical planarization considering the promoted chemical reaction by the down pressure

4. Hollow Silica Spheres: Synthesis and Mechanical Properties

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