Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2006/JM/B511301F
Reference120 articles.
1. Thin films of organic polymer composites with inorganic aerogels as dielectric materials: polymer chain orientation and properties
2. In Search of Low- k Dielectrics
3. Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres
4. Imprinting Well-Controlled Nanopores in Organosilicate Dielectric Films: Triethoxysilyl-Modified Six-Armed Poly(?-caprolactone) and Its Chemical Hybridization with an Organosilicate Precursor
5. In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-k Organosilicate Dielectric Thin Films
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