AlN-based film buck acoustic resonator operated in shear mode for detection of carcinoembryonic antigens
Author:
Affiliation:
1. Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials
2. Faculty of Physics & Electronic Science
3. Hubei University
4. Wuhan 430062
5. China
6. Faculty of Chemistry and Chemical Engineering
Abstract
A film buck acoustic resonator (FBAR) operated in shear mode was fabricated and integrated with a microchannel for detection of the carcinoembryonic antigens (CEA).
Funder
National Natural Science Foundation of China
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/RA/C5RA21900K
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