Soft thermal nanoimprint with a 10 nm feature size-Reference-Cited by-同舟云学术

Soft thermal nanoimprint with a 10 nm feature size

Published:2019 Issue:13 Volume:15 Page:2897-2904
ISSN:1744-683X
Container-title:Soft Matter
language:en
Short-container-title:Soft Matter

Author:

Pandey Ashish¹²³⁴⁵,Tzadka Sivan¹²³⁴⁵,Yehuda Dor¹²³⁴⁵,Schvartzman Mark¹²³⁴⁵^ORCID

Affiliation:

1. Department of Materials Engineering

2. Ilse Katz Institute for Nanoscale Science and Technology

3. Ben-Gurion University of the Negev

4. Beer-Sheva

5. Israel

Abstract

We explore the miniaturization edge of soft nanoimprint molds, and demonstrate their feasibility to ultra-high resolution patterning of polymer films on planar and curved substrates, as well as of chalcogenide glasses.

Funder

Israel Science Foundation

PAZY Foundation

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2019/SM/C8SM02590H

Reference63 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. Imprint Lithography with 25-Nanometer Resolution

3. Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

4. High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates

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