Local atomic order of the amorphous TaOx thin films in relation to their chemical resistivity
Author:
Affiliation:
1. Institute of Physics
2. Polish Academy of Sciences
3. 02-668 Warsaw
4. Poland
5. Łukasiewicz Research Network – Institute of Electron Technology
Abstract
The experimental and theoretical studies of the local atomic order and chemical binding in tantalum oxide amorphous films are presented.
Funder
Infrastruktura PL-Grid
Seventh Framework Programme
Ministerstwo Nauki i Szkolnictwa Wyższego
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/RA/C9RA07318C
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