1. School of Microelectronics, Dalian University of Technology, Dalian Liaoning, 116024, China
2. State Key Laboratory of ASIC and Systems, School of Microelectronics, Fudan University, Shanghai, 200433, China
3. National Integrated Circuit Innovation Centre, Shanghai, 201203, China
4. Institute of Microelectronics, Tsinghua University, Beijing, 100084, China
5. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian Liaoning, 116024, China