The effect of solvent on Al-doped ZnO thin films depositedviaaerosol assisted CVD
Author:
Affiliation:
1. Materials Chemistry Centre
2. Department of Chemistry
3. University College London
4. London
5. UK
Abstract
Aluminium-doped zinc oxide (AZO) thin films were depositedviaaerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate at 450 °C.
Funder
Engineering and Physical Sciences Research Council
University College London
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2018/RA/C8RA06417B
Reference46 articles.
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5. Aerosol-assisted delivery of precursors for chemical vapour deposition: expanding the scope of CVD for materials fabrication
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