Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS-Reference-Cited by-同舟云学术

Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS

Published:2011 Issue:3 Volume:26 Page:542-549
ISSN:0267-9477
Container-title:J. Anal. At. Spectrom.
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Lobo Lara,Fernández Beatriz,Pereiro Rosario,Bordel Nerea,Demenev Evgeny,Giubertoni Damiano,Bersani Massimo,Hönicke Philipp,Beckhoff Burkhard,Sanz-Medel Alfredo

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2011/JA/C0JA00197J

Reference30 articles.

1. Inorganic mass spectrometry as a tool for characterisation at the nanoscale

2. Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

3. Tissue Molecular Ion Imaging by Gold Cluster Ion Bombardment

4. M. G. Dowsett , J.Bellingham, S.Al-Harti, B.Guzman, T. J.Ormsby, G. A.Cooke, C.McConville, Proceedings of the Second International Symposium on SIMS and Related Techniques, Seikei University, Japan, 2000

5. An (un)solvable problem in SIMS: B-interfacial profiling

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Systematic compositional analysis of sputter-deposited boron-containing thin films;Journal of Vacuum Science & Technology A;2021-12

2. Assessing boron quantification and depth profiling of different boride materials using ion beams;Surface and Coatings Technology;2021-07

3. A study of matrix and admixture elements in fluorine‐rich ionic conductors by pulsed glow discharge mass spectrometry;Rapid Communications in Mass Spectrometry;2020-05-04

4. Neon plasma for effective ionisation of oxygen and fluorine in pulsed glow discharge – high ionisation energy elements' quantification in potassium titanyl phosphate single crystals;Journal of Analytical Atomic Spectrometry;2019

5. Pulsed glow discharge enables direct mass spectrometric measurement of fluorine in crystal materials – Fluorine quantification and depth profiling in fluorine doped potassium titanyl phosphate;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-07