Systematic compositional analysis of sputter-deposited boron-containing thin films-Reference-Cited by-同舟云学术

Systematic compositional analysis of sputter-deposited boron-containing thin films

Published:2021-12 Issue:6 Volume:39 Page:063408
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Bakhit Babak¹^ORCID,Primetzhofer Daniel²^ORCID,Pitthan Eduardo²^ORCID,Sortica Mauricio A.²^ORCID,Ntemou Eleni²,Rosen Johanna¹,Hultman Lars¹^ORCID,Petrov Ivan¹³⁴,Greczynski Grzegorz¹^ORCID

Affiliation:

1. Thin Film Physics Division, Department of Physics (IFM), Linköping University, Linköping SE-58183, Sweden

2. Applied Nuclear Physics, Department of Physics and Astronomy, Uppsala University, Uppsala SE-75120, Sweden

3. Materials Research Laboratory and Department of Materials Science, University of Illinois, Urbana, Illinois 61801

4. Department of Materials Science and Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan

Funder

Vetenskapsrådet

Knut och Alice Wallenbergs Stiftelse

Energimyndigheten

Carl Tryggers Stiftelse för Vetenskaplig Forskning

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001234

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