Analysis of the electron emission characteristics and working mechanism of a planar bottom gate vacuum field emission triode with a nanoscale channel-Reference-Cited by-同舟云学术

Analysis of the electron emission characteristics and working mechanism of a planar bottom gate vacuum field emission triode with a nanoscale channel

Published:2021 Issue:34 Volume:13 Page:14363-14370
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Wang Xiao¹^ORCID,Xue Tao¹,Shen Zhihua²,Long Minggang³,Wu Shengli³

Affiliation:

1. School of Electronic Information and Artificial Intelligence, Shaanxi University of Science and Technology, Xi'an 710049, China

2. School of Electronics and Information Engineering, Nantong Vocational University, Nantong 226007, China

3. Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China

Abstract

A separate planar lateral VFET device with a nanoscale channel was fabricated, which exhibited good emission characteristics in vacuum and can be operated in air. Field-assisted thermal emission explains the emission mechanism at low voltage.

Funder

National Natural Science Foundation of China

Scientific Research Plan Projects of Shaanxi Education Department

Natural Science Research of Jiangsu Higher Education Institutions of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2021/NR/D1NR02773E

Reference27 articles.

1. Nanowires in Nanoelectronics