Study of mechanical degradation of freestanding ALD Al2O3 by a hygrothermal environment and a facile protective method for environmentally stable Al2O3: toward highly reliable wearable OLEDs-Reference-Cited by-同舟云学术

Study of mechanical degradation of freestanding ALD Al₂O₃ by a hygrothermal environment and a facile protective method for environmentally stable Al₂O₃: toward highly reliable wearable OLEDs

Published:2023 Issue:10 Volume:10 Page:4488-4500
ISSN:2051-6347
Container-title:Materials Horizons
language:en
Short-container-title:Mater. Horiz.

Author:

Lee Sangmin¹,Jeon Yongmin²^ORCID,Oh Seung Jin¹^ORCID,Lee Sun-Woo¹,Choi Kyung Cheol³^ORCID,Kim Taek-Soo¹^ORCID,Kwon Jeong Hyun⁴^ORCID

Affiliation:

1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

2. Department of Biomedical Engineering, Gachon University, Seongnam 13120, Republic of Korea

3. School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

4. Department of Display and Semiconductor Engineering, Sun Moon University, Choongcheongnam-do, Asan, 31460, Republic of Korea

Abstract

We introduce a functional silane-based inorganic–organic hybrid layer (silamer) to significantly improve the environmental stability of ALD Al2O3 films. Silamer-capped Al2O3 was shown to be an effective candidate for application in wearable OLEDs.

Funder

Korea Evaluation Institute of Industrial Technology

National Research Foundation of Korea

Korea Technology and Information Promotion Agency for SMEs

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2023/MH/D3MH00669G

Reference53 articles.

1. Enhanced moisture barrier performance for ALD-encapsulated OLEDs by introducing an organic protective layer