Assessing the potential of non-pyrophoric Zn(DMP)<sub>2</sub> for the fast deposition of ZnO functional coatings by spatial atomic layer deposition-Reference-Cited by-同舟云学术

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Assessing the potential of non-pyrophoric Zn(DMP)₂ for the fast deposition of ZnO functional coatings by spatial atomic layer deposition

Published:2024 Issue: Volume: Page:
ISSN:2755-3701
Container-title:RSC Applied Interfaces
language:en
Short-container-title:RSC Appl. Interfaces

Author:

Johnston Liam¹^ORCID,Obenlüneschloß Jorit²^ORCID,Khan Niazi Muhammad Farooq¹^ORCID,Weber Matthieu¹,Lausecker Clément¹,Rapenne Laetitia¹,Roussel Hervé¹,Sanchez-Velazquez Camilo¹,Bellet Daniel¹^ORCID,Devi Anjana²³^ORCID,Muñoz-Rojas David¹^ORCID

Affiliation:

1. Grenoble INP, CNRS, LMGP – Grenoble, Univ. Grenoble Alpes, France

2. Inorganic Materials Chemistry, Ruhr Univ. Bochum, 44801, Bochum, Germany

3. Leibniz Institute for Solid State and Materials Research, 01069, Dresden, Germany

Abstract

Growth rates, environmental impact, and functionality of Zn(DMP)2 are explored for the spatial ALD of ZnO and compared to DEZ.

Funder

Agence Nationale de la Recherche

Deutsche Forschungsgemeinschaft

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/LF/D4LF00160E

Reference50 articles.

1. J. R.Van Ommen , A.Goulas and R.Puurunen , in Kirk-Othmer Encyclopedia of Chemical Technology , 2021

2. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

3. Atomic layer deposition (ALD) of palladium: from processes to applications

4. Mechanical properties of boron nitride thin films prepared by atomic layer deposition

5. Atomic Layer Deposition of Metal Sulfide Materials

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