Mechanical properties of boron nitride thin films prepared by atomic layer deposition-Reference-Cited by-同舟云学术

Mechanical properties of boron nitride thin films prepared by atomic layer deposition

Author:

Weber Matthieu¹²³⁴^ORCID,Coy Emerson⁵⁶⁷⁸^ORCID,Iatsunskyi Igor⁵⁶⁷⁸^ORCID,Yate Luis⁹¹⁰¹¹,Miele Philippe¹²³⁴¹²^ORCID,Bechelany Mikhael¹²³⁴^ORCID

Affiliation:

1. Institut Européen des Membranes, IEM-UMR 5635 ENSCM, UM, CNRS

2. Université de Montpellier

3. 34095 Montpellier Cedex 5

4. France

5. NanoBioMedical Centre

6. Adam Mickiewicz University in Poznan

7. Poznan

8. Poland

9. CIC biomaGUNE

10. San Sebastián

11. Spain

12. Institut Universitaire de France (IUF)

Abstract

Unravelling the relation between heat treatments and resulting mechanical properties of boron nitride thin films prepared by ALD.

Funder

Agence Nationale de la Recherche

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

Reference47 articles.

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