Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties-Reference-Cited by-同舟云学术

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Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties

Published:2013 Issue:25 Volume:1 Page:3939
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Xu Ke,Chaudhuri Ayan Roy,Parala Harish,Schwendt Dominik,Arcos Teresa de los,Osten H. Jörg,Devi Anjana

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2013/TC/C3TC30401A

Reference37 articles.

1. Controlled-Synthesis, Self-Assembly Behavior, and Surface-Dependent Optical Properties of High-Quality Rare-Earth Oxide Nanocrystals

2. Sonochemical Synthesis and Optical Properties of Europium Oxide Nanolayer Coated on Titania

3. Multifunctional Nanocrystalline Thin Films of Er2 O3 : Interplay between Nucleation Kinetics and Film Characteristics

4. Introducing crystalline rare-earth oxides into Si technologies

5. High-κ gate dielectrics: Current status and materials properties considerations

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1. Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements;Advanced Materials Interfaces;2024-08-23

2. Interface State Density Modification and Dielectric Reliability Enhancement of ErTi_xO_y/Al₂O₃/InP Laminated Stacks;IEEE Transactions on Electron Devices;2023-04

3. Thermal atomic layer deposition of Er₂O₃ films from a volatile, thermally stable enaminolate precursor;Dalton Transactions;2023

4. Comprehensive investigation of Er2O3 thin films grown with different ALD approaches;Surfaces and Interfaces;2022-11

5. Evaluation of Volatility and Thermal Stability in Monomeric and Dimeric Lanthanide(III) Complexes Containing Enaminolate Ligands;Organometallics;2021-04-22

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