Chemically directed self-assembly of perpendicularly aligned cylinders by a liquid crystalline block copolymer-Reference-Cited by-同舟云学术

Chemically directed self-assembly of perpendicularly aligned cylinders by a liquid crystalline block copolymer

Published:2015 Issue:12 Volume:3 Page:2837-2847
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Yamashita N.¹²³⁴⁵,Watanabe S.⁶⁷⁸⁹⁵,Nagai K.¹²³⁴⁵,Komura M.¹²³⁴⁵,Iyoda T.¹²³⁴⁵,Aida K.¹⁰¹¹¹²⁵,Tada Y.¹⁰¹¹¹²⁵,Yoshida H.¹⁰¹¹¹²⁵

Affiliation:

1. Division of Integrated Molecular Engineering

2. Chemical Resources Laboratory

3. Tokyo Institute of Technology

4. Kanagawa

5. Japan

6. Iyoda Supra-integrated Material Project (iSIM)

7. ERATO

8. Japan Science and Technology Agency (JST)

9. Tokyo

10. Hitachi Research Laboratory

11. Hitachi Ltd

12. Hitachi

Abstract

Chemical epitaxy with a density multiplication process was applied to the perpendicularly oriented hexagonal cylinder nanostructure of liquid crystalline block copolymer (PEO-b-PMA(Az)) thin film through thermally induced microphase separation by using a newly designed PMA(Az)₂₄ brush.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/TC/C4TC02851A

Reference51 articles.

1. Block copolymers and conventional lithography

2. Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates

3. Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication

4. Graphoepitaxy of Spherical Domain Block Copolymer Films

5. Spontaneous Spatial Alignment of Polymer Cylindrical Nanodomains on Silicon Nitride Gratings

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