Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1383805
Reference11 articles.
1. Ferroelectric Memories
2. Nanoscale CMOS
3. Trench storage node technology for gigabit DRAM generations
4. Device application and structure observation for hemispherical‐grained Si
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