Influence of normal load on the three-body abrasion behaviour of monocrystalline silicon with ellipsoidal particle-Reference-Cited by-同舟云学术

Influence of normal load on the three-body abrasion behaviour of monocrystalline silicon with ellipsoidal particle

Author:

Shi Junqin¹²³⁴^ORCID,Chen Juan¹²³⁴,Wei Xinqi¹²³⁴,Fang Liang¹²³⁴^ORCID,Sun Kun¹²³⁴,Sun Jiapeng⁵⁶⁷⁴,Han Jing⁸⁹¹⁰⁴^ORCID

Affiliation:

1. State Key Laboratory for Mechanical Behavior of Materials

2. Xi'an Jiaotong University

3. Xi'an

4. China

5. College of Mechanics and Materials

6. Hohai University

7. Nanjing 210098

8. School of Mechanical and Electrical Engineering

9. China University of Mining and Technology

10. Xuzhou 221116

Abstract

Currently, monocrystalline silicon has been widely applied in micro-electro-mechanical systems (MEMSs).

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

Reference43 articles.

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