Theoretical modeling of ice lithography on amorphous solid water-Reference-Cited by-同舟云学术

Theoretical modeling of ice lithography on amorphous solid water

Published:2022 Issue:25 Volume:14 Page:9045-9052
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Liu Tao¹,Tong Xujie¹,Tian Shuoqiu¹,Xie Yuying¹,Zhu Mingsai¹,Feng Bo¹,Pan Xiaohang¹,Zheng Rui²³^ORCID,Wu Shan²³,Zhao Ding²³^ORCID,Chen Yifang¹^ORCID,Lu Bingrui¹^ORCID,Qiu Min²³^ORCID

Affiliation:

1. Nanolithography and Application Research Group, State Key Laboratory of ASIC and System, School of Information Science and Technology, Fudan University, Shanghai 200433, China

2. Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, 18 Shilongshan Road, Hangzhou 310024, Zhejiang Province, China

3. Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou 310024, Zhejiang Province, China

Abstract

This paper reports on the theoretical modeling of ice lithography (IL) on amorphous solid water for the first time and fills the theoretical study gap on ice lithography as a whole, which will hopefully provide advanced IL-nanofabrication with important guidance.

Funder

National Natural Science Foundation of China

Science and Technology Commission of Shanghai Municipality

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2022/NR/D2NR00594H

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