1. Nanolithography and Application Research Group
2. State Key Lab of ASIC and System
3. School of Information Science and Engineering
4. Fudan University
5. Shanghai 200433
6. State Key Laboratory of Surface Physics and Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education)
7. P. R. China
8. State Key Laboratory of Infrared Physics
9. Shanghai Institute of Technical Physics
10. Chinese Academy of Sciences
11. Shanghai 200083
12. China