UV-induced porosity using photogenerated acids to catalyze the decomposition of sacrificial polymers templated in dielectric films-Reference-Cited by-同舟云学术

UV-induced porosity using photogenerated acids to catalyze the decomposition of sacrificial polymers templated in dielectric films

Published:2007 Issue:9 Volume:17 Page:873-885
ISSN:0959-9428
Container-title:J. Mater. Chem.
language:en
Short-container-title:J. Mater. Chem.

Author:

Abdallah Jassem,Silver Marshall,Bidstrup Allen Sue Ann,Kohl Paul A.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2007/JM/B606438H

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