Incompletely condensed POSS-based spin-on-glass networks for impeccable ultra low-k integration-Reference-Cited by-同舟云学术

Incompletely condensed POSS-based spin-on-glass networks for impeccable ultra low-k integration

Published:2015 Issue:44 Volume:3 Page:11605-11611
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Lee Albert S.¹²³⁴,Choi Seung-Sock¹²³⁴,Oh Sung Yeoun¹²³⁴,Lee He Seung¹²³⁴,Kim Bomin¹²³⁴,Hwang Seung Sang¹²³⁴⁵,Baek Kyung-Youl¹²³⁴⁵

Affiliation:

1. Materials Architecturing Research Center

2. Korea Institute of Science and Technology

3. Seong-Buk Gu

4. Republic of Korea

5. Nanomaterials Science and Engineering

Abstract

The integration reliability of mechanically robust, ultra low-k spin-on-glass poly(methyl)silsesquioxanes incorporating incompletely condensed methyl-POSS were examined for next generation microelectronics.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/TC/C5TC02683K

Reference26 articles.

1. Application of the Protection/Deprotection Strategy to the Science of Porous Materials

2. High-performance ultralow dielectric constant carbon-bridged mesoporous organosilica films for advanced interconnects

3. Low Dielectric Constant Materials

4. Molecular Network Reinforcement of Sol–Gel Glasses

5. Silsesquioxanes

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